Improved tangent space based distance metric for accurate lithographic hotspot classification

Published in In the proceedings of Proceedings of the 49th Annual Design Automation Conference, 2012

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Recommended citation: Jing Guo, Fan Yang, Subarna Sinha, Charles Chiang, Xuan Zeng, "Improved tangent space based distance metric for accurate lithographic hotspot classification." In the proceedings of Proceedings of the 49th Annual Design Automation Conference, 2012.