Improved tangent space-based distance metric for lithographic hotspot classification
Published in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2016
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Recommended citation: Fan Yang, Subarna Sinha, Charles Chiang, Xuan Zeng, Dian Zhou, "Improved tangent space-based distance metric for lithographic hotspot classification." IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2016.