When wafer failure pattern classification meets few-shot learning and self-supervised learning

Published in In the proceedings of 2021 IEEE/ACM International Conference On Computer Aided Design (ICCAD), 2021

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Recommended citation: Hao Geng, Fan Yang, Xuan Zeng, Bei Yu, "When wafer failure pattern classification meets few-shot learning and self-supervised learning." In the proceedings of 2021 IEEE/ACM International Conference On Computer Aided Design (ICCAD), 2021.