L2O-ILT: Learning to optimize inverse lithography techniques
Published in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023
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Recommended citation: Binwu Zhu, Su Zheng, Ziyang Yu, Guojin Chen, Yuzhe Ma, Fan Yang, Bei Yu, Martin Wong, "L2O-ILT: Learning to optimize inverse lithography techniques." IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023.