Streamlining Computational Lithography With Efficient Pattern Database
Published in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2025
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Recommended citation: Su Zheng, Wenqian Zhao, Shuyuan Sun, Fan Yang, Bei Yu, Martin Wong, "Streamlining Computational Lithography With Efficient Pattern Database." IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2025.